Zone Plates

Ramin Mirjalili and Babak Parviz
Dept of Electrical Engineering, University of Washington

Fresnel Zone Plates were fabricated on the backside of sapphire substrates, to provide collimated output of InGaN blue LEDs fabricated on the front size of the wafer. Such LEDs may be used in a contact lens display platform to form in-focus images on the retina from components placed directly on the surface of the cornea.

Shown here are the fabrication sequence, as well as example optical and SEM micrographs of completed zone plates.

Microlight-emitting diode with integrated Fresnel zone plate for contact lens embedded display. Ramin Mirjalili and Babak A. Parviz. J. Micro/Nanolith. MEMS MOEMS 11(3), 033010 (Jul–Sep 2012)