Project Highlights


Here are a few highlights from selected projects using our JEOL JBX-6300FS E-Beam Lithography System











Applications

Graphene Optoelectronics Cell Biomechanics
Silicon Nanowires Diamond Photonics for Quantum Information Processing
Nanoelectronics with Compound Semiconductors Nanomagnetics
Zone Plates

Silicon Photonics Applications

Silicon Photonics Baseline ProcessPhotonic Crystals
Mid-IR Silicon PhotonicsPhotonics Prototyping

Process Capabilities

Greyscale (3D) Resist ProfilingGratings