Reference Data
This section holds system-specific information that is subject to change over time, or with system maintenance.
Aperture Table (size and position of final apertures)
Condition Files (EOS column settings)
PATH Definitions (definitions of recommended PATHs to use, and which calibration subprograms are in each PATH)
Field Sizes - Lens Modes - Grid Sizes
Mode | Terminology | Field Size | Machine Grid Size |
| Higher-Resolution | 5th Lens Mode EOS Mode 6 | 62.5 um | 0.125 nm |
| Higher-Speed | 4th Lens Mode EOS Mode 3 | 500 um | 1.0 nm |
Dose Calculation
Coordinate Modes
Index