Website Update History


23-Sept-2015

Lots of alignment information published (Finally!). 10 pages under that sub-section (some password protected to local users.)
Document EBSEND (sorry, didn't realize that never got on here.)

18-Sept-2015

Update holder information for chip cassettes, including new holders.
Add new Prealign calculation page (PAM to JBX), for up to 4 coordinates.

20-Sept-2014

Added another batch of publications, and fixed a few typos here and there.

03-May-2014

Added many more publications.

29-Mar-2014

Add detailed descriptions of Coordinate Modes

13-Mar-2014

Update job & exposure Checklist, a list of frequently-made-errors.

10-Mar-2014

Add information about using our EBeam services remotely, including details about how to Upload CAD Design Files, and our standard Layout Design Framework.

08-Mar-2014

Add a list of Publications enabled by using our EBeam system.

06-Feb-2014

Add Calculator to predict Stage & Substrate Coordinates from measured PreAlignment Microscope (PAM) Coordinates. Add diagram of various coordinate mode orientations.

30-Jan-2014

Finally created a CAD tutorial section specifically geared toward new users of LayoutEditor.

20-Jan-2014

Working on a fairly comprehensive update, including details such as the facilities name change from MFF to WNF. Like so many websites, this is now partially, but only partially, complete. So pretend there's one of those little "Under construction" signs on pretty much every page...

20-Jan-2014

Working on expanding the Alignment details, starting with some example CAD files with alignment marks. Add a Die Per Wafer calculator (from a third party) for figuring out how many chips you can fit on a wafer.

27-Jun-2013

Added diagram and photo of sample holders.

29-Apr-2013

Update spin-speed curves for P(MMA-MAA) Copolymer resist, to fix an error in the graph titles which had the wrong solvent named (is Ethyl Lactate, not Anisole.)

08-Feb-2013

Update spin-speed curves for ZEP-520A resist dilutions to match dilutions we have, and using measured data.

07-Feb-2013

Add estimates for load/unload/calibrate, and alignment overhead to Job Time Estimator.

28-Jan-2013

Update LayoutBeamer Documentation, Release Notes, Application Notes for JEOL, and Training Videos to version 4.4.2.

25-Jan-2013

Add a web page with a form-based data file upload, for remote users to upload data files for ebeam exposure by MFF Staff. If you have an account on "ebeam", you should not use this, as you will not be able to access files you upload through this. Users with "ebeam" accounts should continue to upload files to your own account using SSH or SCP as before.

17-Aug-2012

Update PMMA 950K spin-speed data with additional dilutions.


10-Apr-2012

Update the details for SFOCUS, including Astigmatism adjustment, as well as details of adjusting scan position to a new, fresh knife edge of the AE mark.

8-Apr-2012

Added initial information about Proximity Correction. Also updated some general text in the Training section.

11-Jan-2012

Much work on the Alignment page, but alas, still incomplete. Just so much to say about alignment...

07-Jan-2012

Add page describing averaging techniques of OVERLAP and FIELD SHIFT writing.

13-Dec-2011

Internal fix to Calculators which should make them work with Chrome again. Add to Minimum ShotPitch calculator field for Minimum MODULAT and Multipass/Field Shift / Overwrite.


13-Dec-2011

Add some Project Highlights

10-Dec-2011

Update GenISys LayoutBEAMER version and add Release Notes

08-Dec-2011

Correct dimensions in Holder description of UW piece holder.

28-Nov-2011

Add some examples in LayoutBEAMER, including a detailed description of shape Fracturing, BIAS, and Coarse/Fine split. Also manual Field Placement.

25-Nov-2011

Add data and examples for P(MMA-MAA) Copolymer resist.
Fix various typos and bad links that slipped through the quality control department.

13-Nov-2011

Many updates, primarily to Operations section, especially Basics and Calibration. Also more detailed description of using PATH

16-Oct-2011

Add LayoutEditor details.

15-Oct-2011

Updated process information.

29-Aug-2011

Updated training summary.

01-Aug-2011

Many updates - Add Operation section (mostly password protected). Trying to flesh out weak and incomplete sections, though many still remain.
Change to new format which allows more hierarchy depth of documents.

14-Jun-2011

Add mandated links in each page footer to UW’s website terms and privacy policy.

14-May-2011

Add new calculator for Minimum Usable Shot Pitch.

9-Apr-2011

Revise the samples in the CAD/Layout/Design Tutorial Section. Hopefully a bit more clear now.

26-Mar-2011

Add CAD/Layout/Design Tutorial Section. ( Still rough around the edges and not yet complete, but it’s a start.)
Update details on Manual Dose assignment, now the Layer or Datatype Mapping to Dose now works in LayoutBEAMER.

06-Mar-2011

Expand holder information

02-Mar-2011

Add window coordinates for UW piece part holder.

25-Feb-2011

Update LayoutBEAMER manual to v4.1.4.
Add LayoutBEAMER training videos (under Documentation, Pattern Prep)