UW College of Engineering has relocated one of its SEMs into the WTC cleanroom, just outside the door of the new ebeam room. It’s a JEOL JSM-7400F, and it’s quite a nice, capable SEM, which is obviously a necessity when making anything on the scale of ebeam structures. It’s a cold-field emitter, and has a loadlock, and handles up to full 4” wafers. The SEM resolution is as small as 1 nm (of course, as with all SEMs that’s an ideal sample under ideal conditions, and with a highly-skilled operator), but it’s certainly the highest resolution SEM in the building. It’s not quite as easy to use as some other SEMs, but with a skilled, patient operator at the helm, it can produce some beautiful images. Talk to me if you’re interested in getting training on this SEM.