JEOL JBX-6300FS E-Beam Lithography
at the Washington Nanofabrication Facility
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Jan 2011
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Oct 2010
50 MHz Scanner Installed
Jan 15, 2011 10:17 AM
Our ebeam system was just updated with a 50 MHz subfield scanner; this increases the maximum clock frequency from 25 MHz to 50 MHz. Full testing has completed and the system is performing well.