JEOL JBX-6300FS E-Beam Lithography
at the Washington Nanofabrication Facility
EBeam Home
News
Project Highlights
Graphene Devices
Biomechanics
Nanowires
Diamond Photonics
Nanoelectronics
Nanomagnetics
Zone Plates
Silicon Photonics
Photonic Crystals
Mid-IR Photonics
Photonics Prototyping
Greyscale EBL
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Project Highlights
Here are a few highlights from selected projects using our JEOL JBX-6300FS E-Beam Lithography System
Applications
Graphene Optoelectronics
Cell Biomechanics

Silicon Nanowires
Diamond Photonics for Quantum Information Processing
Nanoelectronics with Compound Semiconductors
Nanomagnetics

Zone Plates
Silicon Photonics Applications
Silicon Photonics Baseline Process
Photonic Crystals
Mid-IR Silicon Photonics
Photonics Prototyping
Process Capabilities
Greyscale (3D) Resist Profiling

Gratings