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Explanation:

Input the Pre-Alignment Microscope (PAM) coordinates of an alignment mark on your wafer, and this will provide an estimate of the JBX stage position of that mark. The position is given in both JBX stage coordinates and in 'substrate' coordinates, that is, relative to the center of the substrate.

Use '0' for single-wafer holders, and the respective window A-D, for multi-wafer carriers.

Note that the X coordinate has ~ +/- 100 um range; I think this is due to some uncertainty in the way the holders are loaded onto the stage. The Y coordinates are predicted with much better precision, generally within +/- 20 um.